| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a flow rate measurement apparatus capable of efficiently and accurately measuring a flow rate of gas flowing in pores even in the pores with a high aspect ratio and having high operability. <P>SOLUTION: The flow rate measurement apparatus includes suction means 1 for sucking gas at a predetermined pressure lower than atmosphere and a main intake passage 2, 2a and a comparing intake passage 3, 3a respectively connected to the suction means 1. The main intake passage is detachably connected to one side of a pore H, the comparing intake passage is continued to a first measurement reference hole RH1 corresponding to the pore, a second measurement reference hole RH2 corresponding to the pore is included in the comparing intake passage, and a third measurement reference hole RH3 corresponding to the pore is included in the main intake passage. While driving the suction means, gas is sucked respectively through the pore and the first measurement reference hole, and measurement means 15 is provided for measuring a pressure difference between the main intake passage and the comparing intake passage in passages between the pore and the third measurement reference hole and between the first and second measurement reference holes. <P>COPYRIGHT: (C)2013,JPO&INPIT |
