METHOD OF MANUFACTURING METAL OXIDE FILM, METAL OXIDE FILM, ELEMENT USING THE METAL OXIDE FILM, SUBSTRATE WITH METAL OXIDE FILM, AND DEVICE USING THE SUBSTRATE WITH METAL OXIDE FILM

摘要

Provided is a method of manufacturing a metal oxide film to be formed through the following processes: a coating process of forming a coating film on a substrate by using a coating liquid for forming metal oxide film containing any of various organometallic compounds; a drying process of making the coating film into a dried coating film; and a heating process of forming an inorganic film from the dried coating film under an oxygen-containing atmosphere having a dew-point temperature equal to or lower than -10° C.