发明名称 OCTAHEDRAL AND PYRAMID-ON-POST TIPS FOR MICROSCOPY AND LITHOGRAPHY
摘要 A device comprises a cantilever, and an octahedral tip extending from a bottom surface of the cantilever. The octahedral tip comprises a top portion at which the octahedral tip is attached to the cantilever, a bottom portion comprising a first vertex, and a middle portion disposed between the top portion and the bottom portion, the middle portion comprising four additional vertices and being wider than the top portion and the bottom portion. Another device comprises a cantilever, and a tip extending from a bottom surface of the cantilever. The tip comprises an elongated post portion and a pyramidal portion located at one end of the elongated post portion. The cantilever and the tip are formed of a continuous layer of material having a thickness between 400 nm and 1000 nm.
申请公布号 WO2013059670(A2) 申请公布日期 2013.04.25
申请号 WO2012US61132 申请日期 2012.10.19
申请人 NANOINK, INC. 发明人 SHILE, RAYMOND, ROGER
分类号 H01L21/203 主分类号 H01L21/203
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