发明名称 |
OPTICAL ELEMENT MODULE WITH MINIMIZED PARASITIC LOADS |
摘要 |
An optical element module includes an optical element unit and a support structure. The optical element module includes an optical element. The support structure includes a support device and a contact device connected to the support device. A surface of the contact device contacts a surface of the optical element unit and exerts a holding force on the optical element unit along a holding force direction.
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申请公布号 |
US2013100547(A1) |
申请公布日期 |
2013.04.25 |
申请号 |
US201213690227 |
申请日期 |
2012.11.30 |
申请人 |
CARL ZEISS SMT GMBH;CARL ZEISS SMT GMBH |
发明人 |
KUGLER JENS;WEBER ULRICH;SCHAFFER DIRK |
分类号 |
G02B7/02 |
主分类号 |
G02B7/02 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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