发明名称 OPTICAL ELEMENT MODULE WITH MINIMIZED PARASITIC LOADS
摘要 An optical element module includes an optical element unit and a support structure. The optical element module includes an optical element. The support structure includes a support device and a contact device connected to the support device. A surface of the contact device contacts a surface of the optical element unit and exerts a holding force on the optical element unit along a holding force direction.
申请公布号 US2013100547(A1) 申请公布日期 2013.04.25
申请号 US201213690227 申请日期 2012.11.30
申请人 CARL ZEISS SMT GMBH;CARL ZEISS SMT GMBH 发明人 KUGLER JENS;WEBER ULRICH;SCHAFFER DIRK
分类号 G02B7/02 主分类号 G02B7/02
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