SEPARATION DEVICE, SEPARATION SYSTEM AND SEPARATION METHOD

摘要

The invention is a separation device by means of which a polymerized substrate in which a processed substrate and a support substrate are bonded by adhesive is separated into the processed substrate and the support substrate, said separation device comprising: a first holding section that holds the processed substrate in a room temperature state; a second holding section that holds the support substrate in a room temperature state; and a moving mechanism that holds and vertically moves the periphery of the second holding section so that the room-temperature support substrate held by the second support section is continuously separated from the room-temperature processed substrate held by the first holding section, said separation starting from the periphery of said support substrate and progressing toward the central portion thereof.