| 摘要 |
The invention relates to a method for adjusting a C s corrector in a STEM using a crystalline sample. The method comprises recording a through-focus series (104), converting the obtained images to Fourier space (106), thus forming a set of images alike diffraction images. By then determining the symmetry of the Fourier images (108), the corrector can be tuned for better symmetry (110), and the transfer limit can be determined by determining the maximum distance of the spots from the centre. By repeatedly performing these steps, the corrector can be tuned to its optimum performance. |
