| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a piezoelectric actuator which can materialize both the simplification of electric connection structure for supplying a piezoelectric layer with drive voltage and the improvement of reliability on the connection and further can suppress the generation of surplus capacitance during application of drive voltage, too. <P>SOLUTION: The piezoelectric actuator 3 has a vibrating plate which doubles as a common electrode, covering a plurality of pressure chambers 14, a piezoelectric layer 31 which is arranged continuously, astride the plurality of pressure chambers 14, on the topside of this vibrating plate, a plurality of individual electrodes 32 which are made on the topside of this piezoelectric layer 31, an insulating layer 33 which is made all over the topsides of the plurality of individual electrodes 32, a piezoelectric layer 31, and a plurality of wiring parts 35 which are made on the topside of this insulating layer 33. A through hole 33a is made in a region which faces both the individual electrodes 32 and the wiring parts 35 of the insulating layer 33, and the individual electrodes 32 and the wiring parts 35 are connected with each other by conductive material 36 filled in the through holes 33a. <P>COPYRIGHT: (C)2007,JPO&INPIT |
