发明名称 |
PIEZOELECTRIC/ELECTROSTRICTION ELEMENT MANUFACTURING METHOD |
摘要 |
A method for manufacturing a piezoelectric /electrostrictive element includes a step of subjecting the piezoelectric/electrostrictive film to a heat treatment and a polarization treatment after the film is allowed to stand until the value of an electric constant has converged after the heat treatment. The piezoelectric/electrostrictive element manufactured in this method has small stress remaining in the piezoelectric/electrostrictive film, and predetermined performance regarding, for example, a displacement amount, a displacement-generating force, and an electric power efficiency (consumed electric power) as a piezoelectric/electrostrictive element (piezoelectric/electrostrictive film) is never spoiled. |
申请公布号 |
EP1901362(B1) |
申请公布日期 |
2013.04.24 |
申请号 |
EP20060767588 |
申请日期 |
2006.06.29 |
申请人 |
NGK INSULATORS, LTD. |
发明人 |
OHNISHI, TAKAO;WADA, TAKASHI;YAMADA, TOMOHIRO;TANI, MAKOTO |
分类号 |
H01L41/09;H01L41/08;H01L41/18;H01L41/187;H01L41/22;H01L41/257;H01L41/39 |
主分类号 |
H01L41/09 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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