发明名称 |
MICRO ROCKING DEVICE HAVING TORSION BAR |
摘要 |
A micro-oscillating element is provided with a frame (113) and a oscillating member (111) connected with the frame (113) via a connector (112). Each connector (112) includes two torsion bars (112a), each torsion bar (112a) being constructed so that the rigidity becomes relatively high toward the frame (113) and relatively low toward the oscillating member (111) by forming a plurality of holes (112b). <IMAGE> |
申请公布号 |
EP1542059(B1) |
申请公布日期 |
2013.04.24 |
申请号 |
EP20020760638 |
申请日期 |
2002.08.14 |
申请人 |
FUJITSU LIMITED |
发明人 |
MI, XIAOYU;TSUBOI, OSAMU;UEDA, SATOSHI;SAWAKI, IPPEI |
分类号 |
G02B26/10;B81B3/00;B81B5/00;G02B26/08 |
主分类号 |
G02B26/10 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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