| 摘要 |
PURPOSE: A four point probe is provided to maximize accuracy of surface resistance measurement by maintaining tension of four probes by connecting a probe implemented with tungsten carbide with a wire through an elastic device and a substrate without direct soldering and simultaneously by minimizing a distance between probes. CONSTITUTION: A four point probe includes a more than one probes(311), an elastic device(312) compressively inserted into the each probe and a substrate(313) including a sub-hole electrically connected to a main hole electrically connected to the elastic device.
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