| 摘要 |
<p>One of embodiments relates to an illumination optical system which can illuminate an illumination target surface with light in a required polarization state, while reducing influence of retardation caused by a subsequent optical system behind a polarization converting member. According to an embodiment, the illumination optical system (1-12) for illuminating an illumination target surface (M) with light from a light source (LS) is provided with a polarization converting member (5A) which converts a polarization state of incident light so as to form a pupil intensity distribution in a predetermined polarization state on an illumination pupil of the illumination optical system; and a phase modulating member (5B) which is arranged in the optical path on the illumination target surface side with respect to the polarization converting member and which transmits light from the pupil intensity distribution so as to convert linearly polarized light thereof polarized in a first direction, into required elliptically polarized light and maintain a polarization state of linearly polarized light polarized in a second direction (X-direction or Y-direction) obliquely intersecting with the first direction, in order to reduce influence of retardation caused by a subsequent optical system between the polarization converting member and the illumination target surface.</p> |
