SCRIBING APPARATUS

摘要

PURPOSE: A scribing apparatus is provide to accurately forma scribing line by thermal stress by removing residual coolant from a predetermined line by including a gas jet part. CONSTITUTION: A scribing apparatus comprises a table(1), a scribing head(9), and a transfer apparatus. The scribing head has a laser irradiating part(10) and a refrigerant spraying part(11). The laser irradiation part irradiate a brittle material substrate(W) with laser beam and forms a laser spot. The refrigerant spray part sprays liquid refrigerant toward a back position of the laser spot and forms a cooling spot. The scribing apparatus transfers the laser spot and cooling spot along a scribing predetermined line and forms a scribing line by thermal stress. The scribing head additionally includes a gas spraying part(12) and spray gas toward the front location of the laser spot.