发明名称 SEMICONDUCTOR DEVICE AND MANUFACTURING METHOD OF THE SAME
摘要 PURPOSE: A semiconductor device and a manufacturing method thereof are provided to prevent a mismatch by including a thin film resistance pattern with a regular profile. CONSTITUTION: A first insulation layer(200) is arranged on a semiconductor substrate. Metal patterns(300) are arranged on the first insulation layer. A thin film resistance pattern(700) is arranged on the metal patterns. An antireflection layer(500) is arranged between the thin film resistance pattern and the metal patterns. The thin film resistance pattern vertically overlaps with the antireflection layer.
申请公布号 KR20130040601(A) 申请公布日期 2013.04.24
申请号 KR20110105469 申请日期 2011.10.14
申请人 DONGBU HITEK CO., LTD. 发明人 LEE, CHANG EUN
分类号 H01L27/02 主分类号 H01L27/02
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