| 摘要 |
<p>A capacitive pressure sensor for measuring a pressure difference between two media, which is not sensitive to moisture is provided. The pressure sensor (1) for measuring the pressure difference between a first medium (3) and a second medium (5), said pressure sensor (1) comprises
a capacitive pressure sensor (7) and
a second pressure sensor (9). The capacitive pressure sensor (7) having a cavity (70) hermetically sealed by a membrane (72) at a first access region (31) for action of the first medium (3) onto the capacitive pressure sensor (7), the capacitive pressure sensor (7) having a first electrode (74), and a second electrode (75), with the first electrode (74) being arranged at or forming a part of the membrane (72) and the second electrode (75) being at a distance to the first electrode (74) so that a deformation of the membrane (72) changes the distance between the first and the second electrode (74, 75), the change in distance causing a change of the capacitance of a capacitor formed by the first and second electrodes (74, 75), the cavity (70) being evacuated so that the capacitive sensor (7) forms an absolute pressure sensor for measuring the absolute pressure of the first medium (3), and the second pressure sensor (9) also being designed as an absolute pressure sensor and being arranged at a second access region (51) for action of the second medium (5) onto the second pressure sensor (9).</p> |
