METHOD FOR THE PRODUCTION OF A DISK-SHAPED WORKPIECE BASED ON A DIELECTRIC SUBSTRATE, AND VACUUM PROCESSING SYSTEM THEREFOR

摘要

Disclosed is a dielectric substrate (100) that is coated in a vacuum deposition station (102) with a layer whose material is provided with a specific resistance (P), said specific resistance being defined as follows: 10<-5 >ohm cm <= RHO &LE; 10<-1> ohm cm, in such a way that the resulting surface resistance Rs lies within the following range: 0 < Rs <= 10<-4> ohmð. The coated dielectric substrate (104) is then subjected to a reactive high-frequency plasma processing step in another station (105).