| 发明名称 |
METHOD AND APPARATUS FOR DETERMINING CHARACTERISTICS OF A LASER BEAM SPOT |
| 摘要 |
<p>A method of determining the dimensions of a laser beam spot, comprising: scanning the laser beam in a path across a reference-edge having a photodetector positioned therebehind; and measuring an output signal from the photodetector during the scanning, the output signal corresponding to an area of the laser beam spot incident on the photodetector during the scanning.</p> |
| 申请公布号 |
EP1224442(B1) |
申请公布日期 |
2013.04.24 |
| 申请号 |
EP20000961885 |
申请日期 |
2000.09.13 |
| 申请人 |
AMO MANUFACTURING USA, LLC |
发明人 |
YEE, KINGMAN;CLAPHAM, TERRANCE, N. |
| 分类号 |
G01B11/00;G01J1/00;A61B17/00;A61F9/007;A61F9/008;A61F9/01;B23K26/42;G01B11/28;G01C1/00;G01J1/02;G01J1/42;H01S3/00;H01S3/101 |
主分类号 |
G01B11/00 |
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