RAPID HEAT TREATMENT SYSTEM OF LIGHT ABSORBER LAYER IN SOLAR CELL

摘要

PURPOSE: A rapid heat treatment system of a light absorber layer in a solar cell is provided to reduce the size of a system by installing chambers in a cluster chamber for modulation. CONSTITUTION: A loading unit(10) loads a substrate on a conveyer belt. A preheated part(20) preheats the substrate in a set temperature. A cluster chamber(30) provides a heating source for heating the substrate. A conveying unit(32) transfers the substrate to a chamber(31). A cooling part(40) cools a transferred substrate which is heat-treated in the cluster chamber. [Reference numerals] (AA) Collection;