| 摘要 |
<p>PURPOSE: An imprinting method, an imprinting apparatus, and a method for manufacturing a device are provided to improve overlap precision between a mold and a resin of a substrate by deforming a pattern region of a substrate side through a heating process. CONSTITUTION: A substrate is maintained on a maintaining surface. A pattern region of a substrate side is deformed. A mold(7) is contacted with a resin(14) on the deformed pattern region of the substrate side. The resin is hardened. The mold is separated from the resin. A deformation force is applied to the substrate along the surface of the substrate. The deformation force is larger than the maximum static friction applied between the maintaining surface and the rear of the substrate corresponding to the pattern region of the substrate side.</p> |
