| 摘要 |
The present invention relates to a planar 3-DOF (degree of freedom) stage, which includes: a transitional manipulator section having parallel 2-DOF; a rotation manipulator section having rotation 1-DOF so as to carry out motion independently from the transitional manipulator section; and a stage base mounted with the transitional manipulator section and the rotation manipulator section and having a fixing section inside and a driving section outside. According to the planar 3-DOF stage, transitional motion and rotational motion are independently carried out so that it is possible to reduce motion errors and simplify control and design. |
