发明名称
摘要 PROBLEM TO BE SOLVED: To provide a semiconductor device manufacturing method for manufacturing highly reliable semiconductor device without any change in the manufacturing process of the related art, and also to provide a bonding sheet used in the same method and a semiconductor device attained with the same method.SOLUTION: The semiconductor device manufacturing method comprises a temporary fixing process for temporarily fixing a semiconductor element 13 on a fixing body 11 via a bonding sheet 12, a wire bonding process for wire bonding to the semiconductor element 13, and a sealing process to seal the semiconductor element 13 with a sealing resin 15. Loss elasticity at 175°C of the bonding sheet 12 is 2000 Pa or more.
申请公布号 JP5187923(B2) 申请公布日期 2013.04.24
申请号 JP20120092101 申请日期 2012.04.13
申请人 发明人
分类号 H01L21/52;H01L25/065;H01L25/07;H01L25/18 主分类号 H01L21/52
代理机构 代理人
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