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发明名称
Photolytic processes for fabricating thin film patterns
摘要
申请公布号
US3271180(A)
申请公布日期
1966.09.06
申请号
US19620205821
申请日期
1962.06.19
申请人
INTERNATIONAL BUSINESS MACHINES CORPORATION
发明人
WHITE PETER
分类号
C23C16/48;H01L49/02
主分类号
C23C16/48
代理机构
代理人
主权项
地址
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