| 摘要 |
PURPOSE: A fluid spraying apparatus is provided to have first and second connecting paths for connecting an inlet and an outlet and to prevent the spreading of a fluid sprayed from the outlet by supplying enough amount of the fluid to the outlet through a different connecting path although a foreign substance formed in one of the first and second connecting paths disturbs the flow of the fluid, thereby improving the stability of a facility and a processing yield rate. CONSTITUTION: A fluid spraying apparatus(100) includes an upper panel(110), a lower panel(120), a fluid supply port(150) supplying a fluid, an inlet(130), a first buffer unit(132), at least two connecting paths(136,137), a second buffer unit(134), and an outlet(138). The fluid spraying apparatus is used to supply the fluid to a substrate(10) in a knife shape. A processing process about the substrate is performed by transferring the substrate to a first direction(D1) in the manufacture of a panel display device and supplying the fluid to the substrate. The inlet connected to the fluid supply port supplies the fluid. The first buffer unit is connected to the inlet. The connecting paths are connected to the first buffer unit. The second buffer unit is connected to the connecting paths, and the outlet for supplying the fluid to the substrate is connected to the second buffer unit.
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