发明名称 Charge trap type non-volatile memory device and method for fabricating the same
摘要 There is provided a charge trap type non-volatile memory device and a method for fabricating the same, the charge trap type non-volatile memory device including: a tunnel insulation layer formed over a substrate; a charge trap layer formed over the tunnel insulation layer, the charge trap layer including a charge trap polysilicon thin layer and a charge trap nitride-based layer; a charge barrier layer formed over the charge trap layer; a gate electrode formed over the charge barrier layer; and an oxide-based spacer formed over sidewalls of the charge trap layer and provided to isolate the charge trap layer.
申请公布号 US8426280(B2) 申请公布日期 2013.04.23
申请号 US201213448046 申请日期 2012.04.16
申请人 DONG CHA-DEOK;HYNIX SEMICONDUCTOR INC. 发明人 DONG CHA-DEOK
分类号 H01L21/336 主分类号 H01L21/336
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