发明名称 Method for depositing of barrier layers on a plastic substrate as well as coating device therefor and a layer system
摘要 The present invention refers to a coating device for depositing of barrier layers on a plastic substrate comprising a first coating station for depositing a first layer comprising a metal and a second coating station for depositing a second layer comprising a resin, wherein a treatment station for treating the deposited first layer is arranged between the first and the second coating stations which comprises sputter means for depositing one or several atomic layers or isles of deposition material. The invention further refers to an appropriate method which can be carried out by the coating device and to a layer system produced thereby.
申请公布号 US8425738(B2) 申请公布日期 2013.04.23
申请号 US20090418130 申请日期 2009.04.03
申请人 HOFFMAN GERD;QUICENO ALEXANDRA L.;APPLIED MATERIALS, INC.;BIOFILM S.A. 发明人 HOFFMAN GERD;QUICENO ALEXANDRA L.
分类号 C23C14/34 主分类号 C23C14/34
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