发明名称 |
System and method of non-linear grid fitting and coordinate system mapping |
摘要 |
A system and method of non-linear grid fitting and coordinate system mapping may employ data processing techniques for fitting a set of measured fiducial data to an ideal set of fiducials; the fiducials may be arranged in a known (e.g., Cartesian grid) pattern on a substrate imaged by an imaging apparatus. Exemplary embodiments may model the non-linear transformation to and from imaged coordinates (i.e., coordinates derived from acquired image data) and artifact coordinates on the fiducial plate (i.e., actual coordinates of the fiducial relative to a reference point on the fiducial plate). |
申请公布号 |
US8428393(B2) |
申请公布日期 |
2013.04.23 |
申请号 |
US20040800420 |
申请日期 |
2004.03.12 |
申请人 |
KRAFT RAYMOND H.;RUDOLPH TECHNOLOGIES, INC. |
发明人 |
KRAFT RAYMOND H. |
分类号 |
G06K9/36;G06T3/00;G06T7/00 |
主分类号 |
G06K9/36 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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