发明名称 |
Active scanner bow compensator |
摘要 |
An active scanner bow compensator for use with a scanner is described. The scanner includes a moveable scanning platform supported within a frame. The active scanner bow compensator supports the scanner and includes a frame of reference, sensors, and an actuator. The sensors detect out-of-plane motion of the scanning platform relative to the frame of reference, and the actuators compensate for the out-of-plane motion by adjusting the orientation of the frame relative to the frame of reference. The active scanner bow compensator may be used in atomic force microscopy applications.
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申请公布号 |
US8424364(B2) |
申请公布日期 |
2013.04.23 |
申请号 |
US20090618316 |
申请日期 |
2009.11.13 |
申请人 |
MOLONI KATERINA;ARNDT RICHARD;CHASTEEN LUCAS;CODE DOUGLAS M.;FROST ADAM;KLEMP TIMOTHY K.;NPOINT, INC. |
发明人 |
MOLONI KATERINA;ARNDT RICHARD;CHASTEEN LUCAS;CODE DOUGLAS M.;FROST ADAM;KLEMP TIMOTHY K. |
分类号 |
G01C25/00;G01P21/00;G01Q10/00;G01Q40/00;H02N2/06 |
主分类号 |
G01C25/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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