| 发明名称 |
Methods of forming molybdenum sputtering targets |
| 摘要 |
In various embodiments, tubular sputtering targets are produced by forming a tubular billet at least by pressing molybdenum powder in a mold and sintering the pressed molybdenum powder, working the tubular billet to form a worked billet, and heat treating the worked billet.
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| 申请公布号 |
US8425833(B2) |
申请公布日期 |
2013.04.23 |
| 申请号 |
US201113340973 |
申请日期 |
2011.12.30 |
| 申请人 |
LEMON BRAD;HIRT JOSEPH;WELLING TIMOTHY;DAILY, III JAMES G.;MEENDERING DAVID;ROZAK GARY;O'GRADY JEROME;JEPSON PETER R.;KUMAR PRABHAT;MILLER STEVEN A.;WU RICHARD;SCHWARZ DAVID G.;H.C. STARCK INC. |
发明人 |
LEMON BRAD;HIRT JOSEPH;WELLING TIMOTHY;DAILY, III JAMES G.;MEENDERING DAVID;ROZAK GARY;O'GRADY JEROME;JEPSON PETER R.;KUMAR PRABHAT;MILLER STEVEN A.;WU RICHARD;SCHWARZ DAVID G. |
| 分类号 |
B22F3/12;B22F3/20;B22F3/24;C22C27/04 |
主分类号 |
B22F3/12 |
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