发明名称 JIGS FOR MANUFACTURING SILICON CARBIDE STRUCTURES
摘要 PURPOSE: A jig for manufacturing a silicon carbide structure is provided to have the coefficient of thermal expansion which is different from a high purity-alumina graphite base material and to improve productivity. CONSTITUTION: A graphite base material(10) is a disk or a ring shape. A guide portion(20) touches the external diameter of a disk-type graphite base material. The guide portion touches the external and the inner diameter of a ring-type graphite base material. The guide portion is thicker than the disk-type graphite base material. The guide portion is thicker than the ring-type graphite base material.
申请公布号 KR101257383(B1) 申请公布日期 2013.04.23
申请号 KR20110135672 申请日期 2011.12.15
申请人 TOKAI CARBON KOREA CO., LTD. 发明人 WEON, JONG HWA;YOON, JONG SUNG
分类号 H01L21/3065;H01L21/02 主分类号 H01L21/3065
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