| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a treatment apparatus enabling safe treatment and suppressing the consumption of inert gas in the case of treating organic solvent-containing gas to be treated having highly reactive gas such as hydrogen or acetylene as carrier gas. <P>SOLUTION: An organic solvent recovery apparatus including a plurality of adsorption tanks filled with an adsorbent is adapted to alternately repeat an adsorption process for introducing organic solvent-containing gas to be treated into each adsorption tank, adsorbing an organic solvent by the adsorbent filled in the adsorption tank, and ejecting treated gas reduced in organic solvent concentration, and a desorption process for introducing water vapor into the adsorption tank after the completion of adsorption treatment in the adsorption tank to desorb the organic solvent from the adsorbent filled in the adsorption tank to thereby regenerate the adsorbent. Prior to introducing the gas to be treated, the adsorption tank and piping are substituted with inert gas to lower oxygen concentration, and then the gas to be treated is treated. <P>COPYRIGHT: (C)2013,JPO&INPIT |
