发明名称 SHEET STICKING APPARATUS AND STICKING METHOD, AND SHEET MANUFACTURING APPARATUS AND MANUFACTURING METHOD
摘要 <P>PROBLEM TO BE SOLVED: To allow an unnecessary sheet to be successfully peeled and an adhesive sheet to be successfully stuck. <P>SOLUTION: A sheet sticking apparatus 10 comprises: delivery means 14 for delivering a master roll RS in which a belt-like sheet WS is tentatively adhered to a belt-like peeling sheet RL; cutting means 15 for forming a notch CU in the belt-like sheet WS to form an adhesive sheet AS inside the notch CU and to form an unnecessary sheet US outside the notch CU; and a peeling plate 18 for peeling the adhesive sheet AS from an initial stage peeling region (a tip end in a delivering direction) Sa. The delivery means 14 has tension applying means 17 capable of increasing and decreasing tension applied to the master roll RS, and is provided so as to form a gap SP between an outer edge of the adhesive sheet AS of the initial stage peeling region Sa and the unnecessary sheet US. <P>COPYRIGHT: (C)2013,JPO&INPIT
申请公布号 JP2013074101(A) 申请公布日期 2013.04.22
申请号 JP20110211952 申请日期 2011.09.28
申请人 LINTEC CORP 发明人 ISHIHARA TAKASHI
分类号 H01L21/683 主分类号 H01L21/683
代理机构 代理人
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