| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an inspection apparatus 1 capable of accurately detecting a defect of an inspection work 12 without previously obtaining a defect occurrence place in the inspection work 12, and an inspection method. <P>SOLUTION: The inspection apparatus 1 includes an excitation unit 20 for exciting a fixed member 10 having the inspection work 12 attached thereto and applying vibration to the inspection work 12 and a laser unit 30 for detecting the vibration of the vibrating inspection work 12, and detects and inspects the defect of the inspection work 12 on the basis of the detected vibration. The laser unit 30 is configured to sequentially apply laser light La onto the surface of the inspection work 12 at a plurality of preset measuring points, receive reflected light Lb reflected from the surface of the inspection work 12, and detect the vibration at the measuring points by Doppler effect. The inspection apparatus 1 further includes a control unit 40 that associates the positions of the respective measuring points with each other and outputs measurement data formed by associating the vibrations at the respective points in time series. <P>COPYRIGHT: (C)2013,JPO&INPIT |
