| 摘要 |
<P>PROBLEM TO BE SOLVED: To highly accurately control a flow rate in a flow control valve. <P>SOLUTION: The flow control valve 10 includes a setting device 20 and a valve body 30. The setting device 20 comprises a setting control panel 22 for setting the flow rate and an actuator unit 24 to move the control unit 34 of the valve body 30 in accordance with the set flow rate. The valve body 30 comprises a housing unit 32, a plurality of plate movable element 50 disposed in a flow rate control chamber 40 inside the housing unit 32, and a control unit 34 to decrease/increase the volume of the flow rate control chamber 40. Each plate movable element 50, which has a support hole 52 at the center, comprises a first recess 56 outside the support hole 52, a second recess 58 outside the first recess 56 and a plurality of fine grooves 60 as a shallow groove radially extending from the second recess 58 to the peripheral side. <P>COPYRIGHT: (C)2013,JPO&INPIT |
