| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a sensor element and a sensor device, capable of easily and securely exhibiting excellent detection sensitivity, and to provide a highly reliable electronic apparatus equipped with the sensor device. <P>SOLUTION: A sensor element includes: a base part 21; vibration arms 221, 222 for drive that are driven to vibrate by electric conduction; vibration arms 231, 232 for detection that oscillate in a first direction according to a physical amount applied to the vibration arms 221, 222 for drive and oscillate in a second direction different from the first direction following the drive vibration of the vibration arms 221, 222 for drive; electrodes for detection that are provided for the vibration arms 231, 232 for detection and output electric charge following the oscillation of the vibration arms 231, 232 for detection in the first direction; and electrodes for adjustment that are provided for the vibration arms 231, 232 for detection, are electrically coupled to and have a polarity reverse to the electrodes for detection, and output electric charge following the oscillation of the vibration arms 231, 232 for detection in the second direction. <P>COPYRIGHT: (C)2013,JPO&INPIT |
