| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a split method for an optical waveguide substrate that enables reliable detection of an optical waveguide section and identification of a planned split position. <P>SOLUTION: A split method for an optical waveguide substrate consisting of a transparent body with multiple optical waveguides formed internally includes: a placing step of placing the optical waveguide substrate on a holding table with a holding surface formed by a mirror plane; a planned split position identification step of using imaging means to take an image of a surface of the optical waveguide substrate while emitting illumination light from an upper part of the optical waveguide substrate on the holding table, and identifying a planned split position of the optical waveguide substrate on the basis of a light-dark contrast due to a decrease in a transmitted light volume by an event that reflection light reflected by the mirror plane of the holding table passes through the transparent body section and is partially absorbed or diffused by the optical waveguide section; and a split step of splitting the optical waveguide substrate with a cutting blade by cutting the holding table at the planned split position from an upper surface of the optical waveguide substrate. <P>COPYRIGHT: (C)2013,JPO&INPIT |
