| 摘要 |
PURPOSE: An apparatus and a method for refining trichlorosilane are provided to prevent energy loss separately required for heating the lower stream of a refining column and cooling the upper stream of the refining column by compressing the upper stream and thermally exchanging the upper stream with the lower stream. CONSTITUTION: An apparatus for refining trichlorosilane includes a compressor(401) and a heat exchanger(501). The compressor compresses the upper stream(63) of a refining column(104). The heat exchanger thermally exchanges the compressed upper stream and the lower stream(66) of the refining column. The compressor is drive based on the compression ratio of 1.5 to 10. A method for refining the trichlorosilane includes the following: the upper stream is compressed; and the thermal exchanging process is implemented between the upper stream and the lower stream. |
