| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a vacuum suction apparatus that can improve the strength of a porous body where an object is mounted while improving the smoothness of the porous body, and a method of manufacturing the same. <P>SOLUTION: Slurry is prepared which alumina powder, particles of silicon dioxide, and additive powder of at least selected one or more of oxide, hydroxide, nitrate, and carbonate of group 1A, group 2A, and group 3A elements. The slurry is charged in a recessed part 21 formed in a ceramic molding on which a support part 2 is based. The molding is thermally treated at a temperature above the softening point of silica-alumina-based complex oxide together with dry matter of the slurry charged in the recessed part 21. <P>COPYRIGHT: (C)2013,JPO&INPIT |
