SEMICONDUCTOR MANUFACTURING APPARATUS

摘要

PURPOSE: An apparatus for manufacturing a semiconductor is provided to improve wavelength uniformity in a wafer according to temperature distribution. CONSTITUTION: A wafer carrier(130) is installed in a reaction chamber. A pocket(135) having an opened upper part is formed in the upper side of the wafer carrier . The bottom of the pocket is concaved. The center of the pockets is separated from the center of the wafer carrier with 300mm. A wafer(101) is loaded in the pocket. A heater(145) is arranged under the wafer carrier.