发明名称 SEMICONDUCTOR DEVICE
摘要 <P>PROBLEM TO BE SOLVED: To provide a semiconductor device by which analysis is simple. <P>SOLUTION: A semiconductor device includes: a first wiring 101 capable of transmitting an internal signal; a measurement electrode 100 electrically connected to the first wiring 101; and dummy electrodes 102, 103 which are arranged so as to adjoin the measurement electrode 100, to which ground potential VSS is applied when the internal signal is measured, and desired voltage is applied except when the internal signal is measured. For example, the measurement electrode 100 is annularly formed, the dummy electrodes have the first electrode 102 and the second electrode 103, the first electrode 102 is arranged so as to adjoin a space formed inside the measurement electrode 100, and the second electrode 103 is arranged so as to adjoin the outside of the measurement electrode 100. <P>COPYRIGHT: (C)2013,JPO&INPIT
申请公布号 JP2013074074(A) 申请公布日期 2013.04.22
申请号 JP20110211664 申请日期 2011.09.27
申请人 TOSHIBA CORP 发明人 ISHIGURO SHIGEFUMI;KONO TOMOHITO
分类号 H01L21/822;H01L21/3205;H01L21/66;H01L21/768;H01L21/8244;H01L21/8247;H01L23/522;H01L27/04;H01L27/10;H01L27/11;H01L27/115 主分类号 H01L21/822
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