| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a conveyance system that can receive and convey a substrate from a storage case, and also position the substrate. <P>SOLUTION: A conveyance system 1 includes: a storage case 12; a lifting device 13; a delivery device 14; and a conveyance device 15. The lifting device 13 sequentially positions individual substrates 11 in the storage case 12 at a receiving position by raising and lowering the storage case 12. The delivery device 14 receives the substrate 11 at the receiving position and delivers the substrate 11 to the conveyance device 15 at a delivery position. The conveyance device 15 includes a pair of belts 51 and 51. The pair of belts 51 and 51 are laterally spaced apart, and a plurality of profiles 54 are disposed there so as to be associated with each other. The associated profiles 54 are configured to move together in a conveyance direction, and also support an outer edge part of the substrate 11 delivered at the delivery position and position the substrate 11 at a prescribed position. <P>COPYRIGHT: (C)2013,JPO&INPIT |
