| 摘要 |
<P>PROBLEM TO BE SOLVED: To reduce the time and effort for maintenance by preventing wear of members. <P>SOLUTION: This robot hand and robot includes a plate serving as a base and a plurality of gripping claws which are arranged on the plate and come in contact with the peripheral edge of a substrate such as a semiconductor wafer, to form supporting parts for gripping the substrate. At least one of the gripping claws is rotated along the peripheral edge of the substrate, in contact of the peripheral edge of the substrate. <P>COPYRIGHT: (C)2013,JPO&INPIT |
