| 摘要 |
<p>[Problem] To provide a substrate processing device that is compact and consumes little energy when forming a downflow at a substrate conveyance block. [Solution] A second conveyance block (142b) for conveying substrates (W) to a second substrate processing unit (2) is provided layered below a first conveyance block (142a) for conveying substrates (W) to a first substrate processing unit (2). A first fan filter unit (31) supplies purified air into the first conveyance block (142a). A second fan filter unit (32) supplies purified air taken in via a discharge opening (151) provided to the floor plate (15) at the bottom of the first conveyance block (142a) into the second conveyance block (142b).</p> |
