LOW TEMPERATURE GAS SUPPLY DEVICE, HEAT TRANSFER MEDIUM-COOLING DEVICE, AND LOW TEMPERATURE REACTION CONTROL DEVICE

摘要

This low temperature gas supply device is provided with: a first heat exchanger; a mixing means; and a first control means. The first heat exchanger discharges a mixed gas as a low temperature gas coolant and discharges a low temperature-liquefied gas as a vaporized gas by introducing said low temperature-liquefied gas and the mixed gas, which is the vaporized gas of the low temperature-liquefied gas mixed with a gas of a temperature higher than the low temperature-liquefied gas, and causing same to exchange heat with each other. The mixing means mixes the gas with the vaporized gas discharged from the first heat exchanger and discharges same as a mixed gas. Based on the difference between the temperature detected for the low temperature gas coolant and the intended temperature, the first control means adjusts the respective amounts of the gas and the vaporized gas introduced into the mixing means and regulates the temperature of the low temperature gas coolant to the intended temperature.