摘要 |
<P>PROBLEM TO BE SOLVED: To provide a method for producing an organic thin film which enables rapid film formation, and enables a dense organic thin film with minimal impurities to be formed stably, and in a plurality of consecutive repetitions. <P>SOLUTION: A chemical adsorption film formed on a substrate is characterized in that the substrate has no crystallinity, the chemical adsorption film has crystallinity, molecules constituting the film are regularly filled at a high density, and an interplanar spacing of the film is 4.1 Å. <P>COPYRIGHT: (C)2013,JPO&INPIT |