| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an observation method and an observation device capable of clearly identifying an opaque device pattern formed on a transparent substrate in an observation image. <P>SOLUTION: An adhesive sheet 4 is affixed to a side on which a device pattern 3 is formed, and fixed to a transparent stage 7. Coaxially transmitted illumination light L1 and obliquely transmitted illumination light L2 are irradiated in a superimposed manner from an upper side of the stage 7, and observation is performed by back side observation means 6 from a lower side of the stage 7 via the stage 7. Thereby, in an observation image, a dark (black) device pattern image is observed corresponding to the device pattern 3, and a part other than a device pattern image IP1 is observed brightly. Further, a part IB1 corresponding to bubbles 5 is also observed sufficiently brightly. Thus, a shape of the device pattern 3 can be clearly specified in the observation image. <P>COPYRIGHT: (C)2013,JPO&INPIT |
