发明名称 SHIFT REGISTER FOR MEMORY
摘要 <P>PROBLEM TO BE SOLVED: To provide a shift register for large-capacity memory. <P>SOLUTION: A shift register for memory comprises a substrate 101 and a spiral-shaped channel layer 111 which is formed on the substrate 101 and rotates around a shaft L vertical to a principal surface of the substrate 101. The shift register for memory further comprises three or more control electrodes 1121, 1122, and 1123 which are formed on the substrate 101 and used to transfer electric charge in the channel layer 111, and extend in a direction parallel to the shaft L. <P>COPYRIGHT: (C)2013,JPO&INPIT
申请公布号 JP2013069891(A) 申请公布日期 2013.04.18
申请号 JP20110207707 申请日期 2011.09.22
申请人 TOSHIBA CORP 发明人 FUKUZUMI YOSHIAKI;AOCHI HIDEAKI;FUJIWARA TOMOKO
分类号 H01L21/336;H01L21/339;H01L21/8242;H01L21/8247;H01L27/10;H01L27/108;H01L27/115;H01L29/06;H01L29/762;H01L29/788;H01L29/792 主分类号 H01L21/336
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