| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a slit electrode exhibiting improved work efficiency when replacing a plurality of electrode rods forming a slit-like aperture. <P>SOLUTION: A slit electrode 1 includes an electrode frame 2 having an aperture 3, a plurality of electrode rods 5 juxtaposed in the aperture 3 in a direction intersecting the longitudinal direction, and a plurality of electrode rod support parts 7 supporting the longitudinal ends of respective electrode rods 5 on the opposite sides of the aperture 3. The slit electrode 1 further includes a lid 6 placed on the electrode frame 2 so as to cover the upper surface of the plurality of electrode rod support parts 7 in the juxtaposition direction of the electrode rods 5. When the lid 6 is placed on the upper surface of the electrode rod support parts 7, open ends 13 are formed in the electrode rod support parts 7 in the longitudinal direction of the electrode rods 5. <P>COPYRIGHT: (C)2013,JPO&INPIT |
