| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a defect inspection device capable of performing defect detection with high SN ratio. <P>SOLUTION: A defect inspection device concerning an embodiment includes: a detection part which detects an image on an inspection object; a feature quantity calculation part which calculates a section profile of a defect based on output from the detection part; a re-sampling part which re-samples the calculated section profile to be reconfigured; a product-sum operation part which performs pattern matching between the reconfigured section profile and a template image; and a determination part which determines a result of the pattern matching by using a threshold. Then, the re-sampling part calculates the center of gravity in the calculated section profile, and re-samples the section profile by using the calculated center of gravity as a center pixel to be reconfigured. <P>COPYRIGHT: (C)2013,JPO&INPIT |
