Methods, Systems, And Apparatus For Calibration Of A Positional Offset Between An End Effector And A Position Sensor

摘要

Disclosed are systems and apparatus adapted to aid in calibration of an offset position-between a position sensor and an end effector in a processing system. The system includes a robotic component having an end effector and a position sensor coupled thereto, a teach target having a first geometrical feature, and an offset tool adapted to be engaged by the end effector, the offset tool including a first docking feature. The system further includes a moveable offset target having a second docking feature adapted to be engaged by the first docking feature and a second geometrical feature adapted to be sensed by the position sensor. The end effector moves the offset tool to the offset target and docks them. A position of the teach target and the offset target may then be sensed with the position sensor to determine an actual offset of the end effector with respect to the position sensor. Methods of operating the system are provided, as are other aspects.