发明名称 WASTE MACHINING FLUID TREATMENT DEVICE AND WASTE MACHINING FLUID TREATMENT METHOD
摘要 <p>Provided are a waste machining fluid treatment device and a waste machining fluid treatment method which are capable of maintaining the conductivity of a machining fluid within a predetermined range. A waste machining fluid treatment device supplies a machining fluid to a machining device (1), and supplies a used machining fluid again to the machining device (1). The waste machining fluid treatment device comprises: an ion exchange means (18) which performs ion exchange on the used machining fluid; and a conductivity measurement means (20) which is located just before the ion exchange means (18) in a circulation path of the used machining fluid, and measures the conductivity of the machining fluid. A control means (30) determines whether or not the conductivity measured by the conductivity measurement means (20) is within a predetermined range, and when determining that the conductivity is outside the predetermined range, sends an instruction to open a path to the ion exchange means (18).</p>
申请公布号 WO2013054576(A1) 申请公布日期 2013.04.18
申请号 WO2012JP68270 申请日期 2012.07.19
申请人 MURATA MANUFACTURING CO.,LTD.;YOSHIDA TSUTOMU 发明人 YOSHIDA TSUTOMU
分类号 B23Q11/10;H01L21/301 主分类号 B23Q11/10
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