SEMICONDUCTOR DEVICE AND METHOD FOR PREPARING SAME
摘要
<p>A semiconductor device and a method for preparing same. The semiconductor device includes: a substrate (101); a device region (102) located on the substrate (101); and at least one stress introduction area (103'') separated from the device region (102) via a separation structure (104), with a stress being introduced into at least a portion of the at least one stress introduction area (103''), and the stress introduced into the at least a portion of the at least one stress introduction area (103'') being generated by radiating by laser a non-crystallizing portion in the at least one stress introduction area (103'') to recrystallize the non-crystallizing portion. The semiconductor device generates a stress in a simpler manner and thereby improves the device performance.</p>
申请公布号
WO2013053084(A1)
申请公布日期
2013.04.18
申请号
WO2011CN01999
申请日期
2011.11.30
申请人
INSTITUTE OF MICROELECTRONICS, CHINESE ACADEMY OFSCIENCES;LIANG, QINGQING;YIN, HUAXIANG;ZHONG, HUICAI;ZHU, HUILONG